Heteroleptic pyrrolecarbaldimine precursors

ABSTRACT

Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No.61/510,604, filed Jul. 22, 2011, the entire contents of which areincorporated herein by reference.

TECHNICAL FIELD

Disclosed are metalloid-containing precursors having the formula (1) or(2):

wherein:

-   -   M is an element selected from Ni, Co, or Mn; and    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group.        Also disclosed are methods of synthesizing the disclosed        metalloid-containing precursors and using the disclosed        metalloid-containing precursors to deposit metalloid-containing        films on one or more substrates via vapor deposition processes.

BACKGROUND

Due to their good stability, chelate complexes of the pyrrole ringsystems such as porphyrins have been quite thoroughly studied andcharacterized. The coordination of a pyrrolecarbaldimine with an alkylgroup as a substituent of the imine function has been studied withCobalt, Nickel, Palladium, Copper (Inorg. Chem. 1964, 3, 1521; Inorg.Chem. 1966, 5, 625; Inorg. Chem. 1977, 16, 1341).

Numerous and important applications have been found forpyrrolecarbaldimine complexes such as post-metallocene catalysis ofethylene polymerization with titanium (Organometallics, 2001, 20, 4793)and hafnium (J. Chem. Soc. Dalton Trans. 2002, 4529) complexes, andfacile C—H activation with platinum derivatives (J. Am. Chem. Soc. 2003,125, 12674).

Heteroleptic complexes including at least one pyrrolecarbaldimine ligandare scarcely reported in the literature. Journal of the Indian ChemicalSociety (1984), 61(7), 571-2 describes a method of synthesizingheteroleptic nickel, copper, palladium and platinumpyrrolylcarbaldimine/acetylacetonate compounds. Chemical Communications(2009), (12), 1550-1552 describes a method for synthesizing heterolepticpalladium pyrrolylcarbaldimine/fluorinated acetylacetonate. Polyhedron(1995), 14(15/16), 2179-87 describes a method of synthesizing nickelpyrrolylcarbaldimine/ketoiminato where the pyrrolylcarbaldimine and theketoiminato are bridged.

SUMMARY

Disclosed are metalloid-containing precursors having one of thefollowing formulae:

wherein:

-   -   M is an element selected from the group consisting of Ni, Co,        and Mn; and    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group. The disclosed metalloid-containing precursors        may further include one or more of the following aspects:    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolylcarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);        and    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II).

Disclosed are processes for the deposition of a metalloid-containingfilm on a substrate. At least one metalloid-containing precursor isintroduced into a reactor having at least one substrate disposedtherein. At least part of metalloid-containing precursor is depositedonto the at least one substrate to form the metalloid-containing film.The at least one metalloid-containing precursor having one of thefollowing formulae:

wherein:

-   -   M is an element selected from the group consisting of Ni, Co,        and Mn; and    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group. The disclosed processes may further include        one or more of the following aspects:    -   introducing at least one reactant into the reactor;    -   the reactant being selected from the group consisting of H₂,        NH₃, SiH₄, Si₂H₆, Si₃H₈, SiH₂Me₂, SiH₂Et₂, N(SiH₃)₃, hydrogen        radicals thereof, and mixtures thereof;    -   the reactant being selected from the group consisting of: O₂,        O₃, H₂O, NO, N₂O, oxygen radicals thereof, and mixtures thereof;    -   the metalloid-containing precursor and the reactant being        introduced into the reactor substantially simultaneously;    -   the reactor being configured for chemical vapor deposition;    -   the reactor being configured for plasma enhanced chemical vapor        deposition;    -   the metalloid-containing precursor and the reactant being        introduced into the chamber sequentially;    -   the reactor being configured for atomic layer deposition;    -   the reactor being configured for plasma enhanced atomic layer        deposition;    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolylcarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)manganese(II);    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);        and    -   the metalloid-containing precursor being        (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II).

Also disclosed are metalloid-containing films deposited by any of theprocesses disclosed above.

NOTATION AND NOMENCLATURE

Certain abbreviations, symbols, and terms are used throughout thefollowing description and claims, and include: the term “alkyl group”refers to saturated functional groups containing exclusively carbon andhydrogen atoms. Further, the term “alkyl group” refers to linear,branched, or cyclic alkyl groups. Examples of linear alkyl groupsinclude without limitation, methyl groups, ethyl groups, propyl groups,butyl groups, etc. Examples of branched alkyls groups include withoutlimitation, t-butyl. Examples of cyclic alkyl groups include withoutlimitation, cyclopropyl groups, cyclopentyl groups, cyclohexyl groups,etc.

The standard abbreviations of the elements from the periodic table ofelements are used herein. It should be understood that elements may bereferred to by these abbreviations (e.g., Ni refers to nickel, Co refersto cobalt, etc.).

As used herein, the term “independently” when used in the context ofdescribing R groups should be understood to denote that the subject Rgroup is not only independently selected relative to other R groupsbearing the same or different subscripts or superscripts, but is alsoindependently selected relative to any additional species of that same Rgroup. For example in the formula MR¹ _(x) (NR²R³)_((4-x)), where x is 2or 3, the two or three R¹ groups may, but need not be identical to eachother or to R² or to R³. Further, it should be understood that unlessspecifically stated otherwise, values of R groups are independent ofeach other when used in different formulas.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Disclosed are metalloid-containing precursors having one of thefollowing formulae:

Wherein:

-   -   M is an element (a metalloid) selected from the group consisting        of Ni, Co, and Mn; and    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group.

Exemplary metalloid-containing precursors include:

-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)    cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)    cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)    cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)    cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)    cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)    cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)    cobalt(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);    (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);-   (N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)manganese(II);-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);    and-   (N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)    manganese(II).

Preferably, the precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);or(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II).Applicants believe that R₁-R₄ being hydrogen, R₅ and R₆ being isopropyl,and R₇ being methyl in Formula 2 will provide compounds having thelowest melting points without significant decrease in volatility.

The disclosed precursors may be synthesized in one step according to thereaction scheme 1 by reacting simultaneously a bis halide or bisacetylacetonate with one equivalent of deprotonated pyrrolylcarbaldimineligand and one equivalent of deprotonated diketiminato or amidinateligand.

wherein:

-   -   M is an element selected from Ni, Co, or Mn;    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group;    -   X is selected from Cl, Br, or acetylacetonate; and    -   Y and Z are independently selected from Li, Na, or K.

Alternatively, the disclosed precursors may be synthesized sequentiallyin two steps according to the reaction scheme 2, by reacting in a firststep a bis halide or bis acetylacetonate with one equivalent ofdeprotonated pyrrolylcarbaldimine ligand and in a second step reactingthe reaction product of the first step with one equivalent ofdeprotonated diketiminato or amidinate ligand.

wherein:

-   -   M is an element selected from Ni, Co, or Mn;    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group;    -   X is selected from Cl, Br, or acetylacetonate;    -   n is 1, 2, or 3; and    -   Y and Z are independently selected from Li, Na, or K.

In another alternative, the disclosed precursors may be synthesizedsequentially in two steps according to the reaction scheme 3, byreacting in a first step a bis halide or bis acetylacetonate with oneequivalent of deprotonated diketiminato or amidinate ligand and in asecond step reacting the reaction product of the first step with oneequivalent of deprotonated pyrrolylcarbaldimine ligand.

wherein:

-   -   M is an element selected from Ni, Co, or Mn;    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group;    -   X is selected from Cl, Br, or acetylacetonate;    -   n is 1, 2, or 3; and    -   Y and Z are independently selected from Li, Na, or K.

In another alternative, the disclosed precursors may be synthesizedaccording to the reaction scheme 4 by reacting a bispyrrolylcarbaldimine with one equivalent of deprotonated or notdeprotonated diketiminato or amidinate ligand.

wherein:

-   -   M is an element selected from Ni, Co, or Mn;    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ are independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group;    -   X is selected from Cl, Br, or acetylacetonate; and    -   Y and Z are independently selected from H, Li, Na, or K.

In another alternative, the disclosed precursors may be synthesizedaccording to the reaction scheme 5 by reacting a bis diketiminato oramidinato with one equivalent of deprotonated or not deprotonatedpyrrolylcarbaldimine ligand.

wherein:

-   -   M is an element selected from Ni, Co, or Mn;    -   each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ are independently        selected from H; a C1-C4 linear, branched, or cyclic alkyl        group; a C1-C4 linear, branched, or cyclic alkylsilyl group        (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic        alkylamino group; or a C1-C4 linear, branched, or cyclic        fluoroalkyl group;    -   X is selected from Cl, Br, or acetylacetonate; and    -   Y is selected from H, Li, Na, or K.

The synthesis may be performed in a polar solvent selected withoutlimitation from THF, acetonitrile, dimethylsulfoxide, or diethylether.

The synthesis may be performed at a temperature ranging fromapproximately 100° C. to approximately 150° C.

A coordinating species may be introduced during the first step inreaction schemes 2 and 3 in order to stabilize the reactionintermediate. The coordinating species may be selected withoutlimitation from trialkylamine (triethylamine),N₁,N₁,N₂,N₂-tetramethylethane-1,2-diamine, pyridine, or ether.

The synthesis may include the steps of removing the solvent, adding anon polar solvent (pentane or hexane for instance) to form a solution,filtering the solution, and removing the solvent to form the disclosedprecursor having the formula (1) or (2).

The synthesis may include the step of purifying the precursor having theformula (1) or (2) by recrystallisation, distillation, or sublimation.

At least part of the disclosed precursors may be deposited to form athin film using any deposition methods known to those of skill in theart. Examples of suitable deposition methods include without limitation,conventional CVD, atomic layer deposition (ALD), and pulsed chemicalvapor deposition (P-CVD). In one alternative, a thermal CVD depositionis preferred, particularly when fast growth, conformality,process-orientation and one direction films are required. In anotheralternative, a thermal ALD deposition process is preferred, particularlywhen superior conformality of films deposited on challenging surfaces(e.g., trenches, holes, vias) is required.

The disclosed precursor is introduced into a reactor in vapor form. Thevapor form of the precursor may be produced by vaporizing a liquidprecursor solution through a conventional vaporization step such asdirect vaporization, distillation, or by bubbling an inert gas (e.g. N₂,He, Ar, etc.) into the precursor solution and providing the inert gasplus precursor mixture as a precursor vapor solution to the reactor.Bubbling with an inert gas may also remove any dissolved oxygen presentin the precursor solution.

If necessary, the container may be heated to a temperature that permitsthe disclosed precursor to be in its liquid phase and to have asufficient vapor pressure. The container may be maintained attemperatures in the range of, for example, 0° C. to 150° C. Thoseskilled in the art recognize that the temperature and pressure of thecontainer may be adjusted in a known manner to control the amount ofprecursor vaporized.

The reactor contains one or more substrates onto which the thin filmswill be deposited. The one or more substrates may be any suitablesubstrate used in semiconductor, photovoltaic, flat panel, or LCD-TFTdevice manufacturing. Examples of suitable substrates include withoutlimitation, silicon, silica, silicon nitride, silicon oxy nitride,carbon doped silica, copper and copper alloys, titanium nitride,tantalum, tantalum nitride, tungsten, or combinations thereof. Thesilicon substrates may optionally be cleaned with a HF rinse prior todeposition. Additionally, substrates comprising tungsten or noble metals(e.g. platinum, palladium, rhodium, ruthenium, or gold) may be used.Substrates may contain one or more additional layers of materials, whichmay be present from a previous manufacturing step. Dielectric andconductive layers are examples of these.

The temperature and the pressure within the reactor and the temperatureof the substrate are held at conditions suitable for vapor deposition ofat least part of the disclosed precursor onto the substrate. The reactoror deposition chamber may be a heated vessel which has at least one ormore substrates disposed within. The reactor has an outlet, which may beconnected to a vacuum pump to allow by products to be removed from thechamber, or to allow the pressure within the reactor to be modified orregulated. The temperature in the chamber is normally maintained at asuitable temperature for the type of deposition process which is to beperformed. In some cases, the chamber may be maintained at a lowertemperature, for instance when the substrates themselves are heateddirectly, or where another energy source (e.g. plasma or radio frequencysource, microwave sources, or UV light) is provided to aid in thedeposition. Examples of reactors include, without limitation, acold-wall type reactor, a hot-wall type reactor, a single-wafer reactor,a multi-wafer reactor, or other types of deposition systems underconditions suitable to cause the precursors to react and form thelayers. Any of these reactors may be used for both ALD and CVD processesand therefore qualify as an ALD reactor or a CVD reactor.

In one alternative, the deposition chamber is maintained at atemperature greater than about 100° C. For example, the temperature ismaintained between about 100° C. and about 500° C., preferably, betweenabout 150° C. and about 350° C. In another alternative, the depositionchamber may be maintained at a temperature ranging from approximately20° C. to approximately 100° C. The pressure in the deposition chamberis maintained at a pressure between about 1 Pa and about 10⁵ Pa, andpreferably between about 25 Pa, and about 10³ Pa.

Depending on the particular process parameters, deposition may takeplace for a varying length of time. Generally, deposition may be allowedto continue as long as desired to produce a film with the necessaryproperties. Typical film thicknesses may vary from a few angstroms toseveral hundreds of microns, depending on the specific depositionprocess.

In some embodiments, a reducing gas is also introduced into the reactionchamber. The reducing gas may be one of hydrogen, ammonia, silane,disilane, trisilane, the plasma excited radicals thereof, and mixturesthereof. Exemplary plasma excited radicals include hydrogen radicals.The plasma excited radicals may be generated by a plasma located withinthe reactor, with the wafer located between two electrodes, or remotefrom the reactor. When the mode of deposition is chemical vapordeposition, the disclosed precursor and the reducing gas may beintroduced to the reaction chamber substantially simultaneously. Whenthe mode of deposition is atomic layer deposition, the disclosedprecursor and the reducing gas may be introduced sequentially, and insome cases, there may be an inert gas purge introduced between theprecursor and reducing gas.

One or more precursors may also be introduced into the reaction chamberand deposited on the substrate. The additional precursors may serve as acomponent of the film to be deposited or as a doping agent (i.e., asmall amount). The additional precursors each may independently comprisean element selected from carbon, copper, gold, iron, lithium, silicon,silver, praseodymium, manganese, ruthenium, titanium, tantalum, bismuth,zirconium, hafnium, lead, niobium, magnesium, aluminum, lanthanum, ormixtures of these. By providing the disclosed precursor along withadditional precursors, a multi-element film may be formed on thesubstrate, for instance, NiC, NiSi, NiAg, AuCo, CuCo, LiCoO, CoSi, CoFe,or LiMnO.

The disclosed precursors and any optional reactants or precursors may beintroduced sequentially (as in ALD) or simultaneously (as in CVD) intothe reaction chamber. The reaction chamber may be purged with an inertgas between the introduction of the precursor and the introduction ofthe reactant. Alternatively, the reactant and the precursor may be mixedtogether to form a reactant/precursor mixture, and then introduced tothe reactor in mixture form. In another alternative, either thedisclosed precursors or any optional reactants or precursors may beintroduced into the reaction chamber, while a second component (eitherthe disclosed precursor or any optional reactants or precursors) ispulsed into the reaction chamber (pulsed CVD).

The disclosed precursor vapor solution and the reaction gas may bepulsed sequentially or simultaneously (e.g. pulsed CVD) into thereactor. Each pulse of precursor may last for a time period ranging fromabout 0.01 seconds to about 10 seconds, alternatively from about 0.3seconds to about 3 seconds, alternatively from about 0.5 seconds toabout 2 seconds. In another embodiment, the reaction gas may also bepulsed into the reactor. In such embodiments, the pulse of each gas maylast for a time period ranging from about 0.01 seconds to about 10seconds, alternatively from about 0.3 seconds to about 3 seconds,alternatively from about 0.5 seconds to about 2 seconds.

In one non-limiting exemplary atomic layer deposition type process, thevapor phase of the disclosed precursor is introduced into the reactionchamber, where it is contacted with a suitable substrate. Excessprecursor may then be removed from the reaction chamber by purgingand/or evacuating the reaction chamber. An oxygen source, such asoxygen, ozone, plasma excited radicals thereof, or combinations thereof,is introduced into the reaction chamber where it reacts with theabsorbed precursor in a self-limiting manner. Any excess oxygen sourceis removed from the reaction chamber by purging and/or evacuating thereaction chamber. If the desired film is an oxide film, this two-stepprocess may provide the desired film thickness or may be repeated untila film having the necessary thickness has been obtained.

Alternatively, if the desired film contains two elements, the vaporphase of the disclosed precursor may be introduced into the reactionchamber, where it is contacted with a suitable substrate. Excessprecursor may then be removed from the reaction chamber by purgingand/or evacuating the reaction chamber. The vapor phase of a secondprecursor, such as a silicon-containing precursor or alithium-containing precursor, is introduced into the reaction chamberwhere it reacts with the absorbed precursor in a self-limiting manner.Any excess second precursor is removed from the reaction chamber bypurging and/or evacuating the reaction chamber. This two-step processmay provide the desired film thickness or may be repeated until a filmhaving the necessary thickness has been obtained.

By varying the number of pulses, films having a desired stoichiometricratio may be obtained. For example, if the NiSi film above contains lessthan the desired amount of nickel, the exemplary process described abovemay be altered to include an additional introduction (e.g., a secondpulse) of the disclosed precursor. One of ordinary skill in the art willrecognize that the number of pulses required to obtain the desired filmmay not be identical to the stoichiometric ratio of the resulting film.

The metalloid-containing films resulting from the processes discussedabove may include Ni, NiC, NiSi, NiAg, NiO, Co, AuCo, CuCo, LiCoO, CoFe,CoO, CoSi, Mn, MnO, MnON, MnSi, or LiMnO. One of ordinary skill in theart will recognize that by judicial selection of the appropriatedisclosed precursor, reactants, and precursors, the desired filmcomposition may be obtained.

While embodiments of this invention have been shown and described,modifications thereof can be made by one skilled in the art withoutdeparting from the spirit or teaching of this invention. The embodimentsdescribed herein are exemplary only and not limiting. Many variationsand modifications of the composition and method are possible and withinthe scope of the invention. Accordingly the scope of protection is notlimited to the embodiments described herein, but is only limited by theclaims which follow, the scope of which shall include all equivalents ofthe subject matter of the claims.

What is claimed is:
 1. A precursor having one of the following formulas:

wherein: M is an element selected from the group consisting of Ni, Co,and Mn; and each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independentlyselected from H; a C1-C4 linear, branched, or cyclic alkyl group; aC1-C4 linear, branched, or cyclic alkylsilyl group (mono, bis, or trisalkyl); a C1-C4 linear, branched, or cyclic alkylamino group; or a C1-C4linear, branched, or cyclic fluoroalkyl group.
 2. The precursor of claim1, selected from the group consisting of:(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldiminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldmethyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldethyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldisopropyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldpropyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldnbutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldsecbutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldisobutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldtertbutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolylcarbaldtrimethylsilyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolylcarbaldiminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);and(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II).
 3. The precursor of claim 2, selected from the groupconsisting of:(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);and(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II).4. A process for the deposition of a metalloid-containing film on asubstrate, comprising the steps of: introducing at least onemetalloid-containing precursor into a reactor having at least onesubstrate disposed therein, the at least one metalloid-containingprecursor having one of the following formula:

wherein: M is an element selected from the group consisting of Ni, Co,and Mn; and each of R₁, R₂, R₃, R₄, R₅, R₆, R₇ and R₈ is independentlyselected from H; a C1-C4 linear, branched, or cyclic alkyl group; aC1-C4 linear, branched, or cyclic alkylsilyl group (mono, bis, or trisalkyl); a C1-C4 linear, branched, or cyclic alkylamino group; or a C1-C4linear, branched, or cyclic fluoroalkyl group; and depositing at leastpart of the metalloid-containing precursor onto the at least onesubstrate to form the metalloid-containing film.
 5. The process of claim4, further comprising introducing at least one reactant into thereactor, wherein the reactant is selected from the group consisting ofH₂, NH₃, SiH₄, Si₂H₆, Si₃H₈, SiH₂Me₂, SiH₂Et₂, N(SiH₃)₃, hydrogenradicals thereof, O₂, O₃, H₂O, NO, N₂O, oxygen radicals thereof, andmixtures thereof.
 6. The process of claim 5, wherein the reactant isselected from the group consisting of H₂, NH₃, SiH₄, Si₂H₆, Si₃H₈,SiH₂Me₂, SiH₂Et₂, N(SiH₃)₃, hydrogen radicals thereof, and mixturesthereof.
 7. The process of claim 5, wherein the reactant is selectedfrom the group consisting of: O₂, O₃, H₂O, NO, N₂O, oxygen radicalsthereof, and mixtures thereof.
 8. The process of claim 5, wherein themetalloid-containing precursor and the reactant are introduced into thereactor substantially simultaneously and the reactor is configured forchemical vapor deposition.
 9. The process of claim 8, wherein thereactor is configured for plasma enhanced chemical vapor deposition. 10.The process of claim 5, wherein the metalloid-containing precursor andthe reactant are introduced into the chamber sequentially and thereactor is configured for atomic layer deposition.
 11. The process ofclaim 10, wherein the reactor is configured for plasma enhanced atomiclayer deposition.
 12. The process of claim 4, wherein themetalloid-containing precursor is selected from the group consisting of:(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)nickel(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)nickel(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)cobalt(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)cobalt(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-dimethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diethyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diisopropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-dipropyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldiminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-di-tert-butyl-2,4-pentanediketiminate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diisopropylformamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldiminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldmethyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldethyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisopropyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldpropyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldnbutyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldsecbutyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldisobutyliminate)manganese(II);(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtertbutyliminate)manganese(II);and(N,N′-diisopropyl-N,N′-dimethylguanidinate)(pyrrolecarbaldtrimethylsilyliminate)manganese(II).13. The process of claim 12, wherein the metal-containing precursor isselected from the group consisting of:(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II);(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II);and(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II).14. The process of claim 12, wherein the metal-containing precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II).15. The process of claim 12, wherein the metal-containing precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II).16. The process of claim 12, wherein the metal-containing precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II).17. The precursor of claim 1, wherein the precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)nickel(II).18. The precursor of claim 1, wherein the precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)cobalt(II).19. The precursor of claim 1, wherein the precursor is(N,N′-diisopropylacetamidinate)(pyrrolecarbaldisopropyliminate)manganese(II).